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Elli-3u
Mid-infrared laser based ellipsometer




λ up to 6 µm

available wavelengths on request

Customizable and modular

Mapping, positioning assistance, compact package

Highest precision

Extremely narrow-band and high spatial resolution

Intuitive and user friendly

Plug & Play over GigE interface


What do we offer?

Our MIR-ellipsometer with rotating analyser Elli-3u solves all problems which prohibit a wide-spread use of ellipsometry in the mid-infrared: high costs, long measuring times, huge and heavy hardware, complex handling and unintuitive software.
Due to modern construction methods, we achieve a package size of 40 cm * 40 cm * 30 cm with a weight of less than 15 kg with high rigidity and stability.

Elli-3u package Elli-3u

The outstanding precision of our laser light source (wavelength up to 6 µm) enables a measurement within parts of a second with a spatial resolution of < 100 µm. Combined with the accuracy of the automatic angle placement of < 0.5° covering the full range from 0° to 90°, automated X-Y-mapping is possible.
An integrated digital microscope with 2.1MP resolution and an auxiliary laser (visible) simplify the correct positioning of the sample (maximum size 70 mm * 70mm * 5 mm). The manually driven sample stage can be tilted in x- and y-direction up to ± 1.8°.

Arms horizontal Arms in upper position

The Ellipsometer will be connected with a standardised GigE-port and can be operated from any computer, regardless of its architecture or operating system. The intuitive user software enables the creation of individual measurement processes, as well as the manual controlling of all components of the ellipsometer. After having positioned the sample all other functions of the device are available via network.

Launch is scheduled in Q3/2018.

Sample holder and microscope Lasercube

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